Cause and Prevention Technique for Streaks generated during Sample Preparation Process using a Focused Ion Beam.

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Other Title
  • 集束イオンビーム法による紙の断面作製時に発生する縦すじの原因とその防止法
  • シュウソク イオンビームホウ ニ ヨル カミ ノ ダンメン サクセイジ ニ ハッセイ スル タテスジ ノ ゲンイン ト ソノ ボウシホウ

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Abstract

A new sample preparation method using a focused ion beam has been developed, as a preparation technique of cross-section for examining the internal structure of paper materials. However, a number of streaks on the cross-section was sometimes generated during irradiation of the beam. From the model experiments using smooth and rough surface films like polyethylene terephthalate or vinyl chloride, the streaks were found to run from a tip of deep micro clacks on the rough surface of the samples. Thin protective layer of tungsten, platinum, or carbon deposited on the rough surface of materials was pronouncedly effective to control of generation of the streaks. In this study, most suitable combination of platinum and carbon for formation of the effective thin layer was discussed from a view point of a practical time period of the effective layer formation.

Journal

  • Sen'i Gakkaishi

    Sen'i Gakkaishi 57 (3), 94-99, 2001

    The Society of Fiber Science and Technology, Japan

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