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Magnetic circuit disign for new vertical sputtering source
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- OUCHI Kazuhiro
- AIT (Akita Research Institute of Advanced Technology)
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- HONDA Naoki
- AIT (Akita Research Institute of Advanced Technology)
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- KOMAKINE Takashi
- AIT (Akita Research Institute of Advanced Technology)
Bibliographic Information
- Other Title
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- 高効率縦型スパッタソースの磁路設計
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Description
A magnetic circuit design by using a computer simulation has been performed, aiming at optimization of parameters for enhancing the magnetic field in the area of plasma formation. By the simulation, it becomes clear as follows: (a) The bottom thickness of the target is one of the most sensitive parameters. (b) The distance between the target bottom and the magnet placed beneath the target is also a sensitive parameter. (c) The effect of a return path formed with soft magnet irons around the target cannot be ignored. (d) The target permeability governs the field so strongly that a particular attention must be paid for high permeability materials to design an efficient magnetic circuits.
Journal
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- Journal of the Magnetics Society of Japan
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Journal of the Magnetics Society of Japan 17 (S_2_PMRS_93), S2_176-181, 1993
The Magnetics Society of Japan ( Nihon Jiki Gakkai )
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Details 詳細情報について
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- CRID
- 1390282680068154368
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- NII Article ID
- 130004477968
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- ISSN
- 18804004
- 02850192
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- Data Source
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- JaLC
- Crossref
- CiNii Articles
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- Abstract License Flag
- Disallowed
