Reconstruction Method for Atom Probe Tomography by Using Field Emission Microscopy
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- Kim Yun
- Institute of Industrial Science, The University of Tokyo
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- Yukawa Tsuyoshi
- Institute of Industrial Science, The University of Tokyo
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- Shirakura Daichi
- Institute of Industrial Science, The University of Tokyo
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- Morita Masato
- Graduate School of Electrical Engineering and Electronics, Kogakuin University
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- Owari Masanori
- Institute of Industrial Science, The University of Tokyo Environmental Science Center, The University of Tokyo
説明
Atom probe tomography (APT) is a three-dimensional (3D) analysis technique with atomic resolution in materials science and engineering. The ionized atoms are sequentially released from the surface of the sample with needle shape by applying high voltage and are detected by the position-sensitive detector. The original arrangement is reconstructed using reconstruction parameters such as the image compression factor and the field factor from recorded data during measurement. It is crucial to the integrity of the reconstruction to estimate the reconstruction parameters as accurately as possible. However, it is difficult to determine the reconstruction parameters accurately due to sequential change of the shape of the sample during measurement. In this study, by using FEM we propose a new reconstruction method that the reconstruction parameters can be determined even during the measurement. [DOI: 10.1380/ejssnt.2016.189]
収録刊行物
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- e-Journal of Surface Science and Nanotechnology
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e-Journal of Surface Science and Nanotechnology 14 (0), 189-192, 2016
公益社団法人 日本表面真空学会
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詳細情報 詳細情報について
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- CRID
- 1390282680163879680
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- NII論文ID
- 130005161533
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- ISSN
- 13480391
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- 本文言語コード
- en
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- データソース種別
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- JaLC
- Crossref
- CiNii Articles
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- 抄録ライセンスフラグ
- 使用不可