Inner Structure and Elastic Modulus of Micro Cantilever Fabricated Using Micro-Stereolithography

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  • マイクロ光造形法で作製した微小構造物の内部構造と縦弾性係数
  • マイクロ ヒカリ ゾウケイホウ デ サクセイシタ ビショウ コウゾウブツ ノ ナイブ コウゾウ ト タテ ダンセイ ケイスウ

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Abstract

It is important to know mechanical properties of micro structures fabricated as a micro machine component by micro-stereolithgraphy (μSL). In the previous study, we reported that elastic modulus of micro cantilevers fabricated by μSL is controlled by irradiation laser power and postcure processing time. In this study, we investigate the correlation between the irradiation laser power and the inner structure of the micro cantilever, which consists of periodic density distribution caused by laser scanning. The structure inside the micro cantilever made under the condition of various fabrication conditions is observed using a digital microscope and a polarizing microscope. Results show that the density of periodic inner structure has an affect on the elastic modulus of the microstructure.

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