光プローブを用いた形状測定の高精度化

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タイトル別名
  • Improvement of Profile Measurement Accuracy using Optical Probe
  • ヒカリ プローブ オ モチイタ ケイジョウ ソクテイ ノ コウセイドカ

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説明

<p>　　　Demands for machining of precision parts have recently increased. In order to meet such requirements, not only ultra-precision machining systems, but also precision profile measuring systems are required. In the profile measurement of precision parts, since the measurement marks have a large influence, a completely non-contact shape measurement method free from measurement marks is required. In the profile measurement using the optical probe, the profile of a specimen is measured by keeping the distance between a lens and a surface constant while scanning. Since the importance of measuring the complex three-dimensional shape increases, the importance of an optical probe that can measure such a shape in a non-contact condition increases. In this paper, problems and research examples in profile measurement using optical probes with high measuring accuracy are explained.</p>

収録刊行物

  • 実験力学

    実験力学 18 (1), 3-9, 2018

    日本実験力学会

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