Alumina Ceramic-to-Metal Seals by the “Mo-Mn Process”

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  • Mo-Mn法によるアルミナ・セラミックと金属との封着
  • Mo-Mnホウ ニ ヨル アルミナ セラミックス ト キンゾク ト ノ フウチャク

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The so called “Mo-Mn Process” is one of the methods for forming ceramic-to-metal hermetic seals by metallizing, nickel plating and succesive hard-soldering.<br>High alumina (94wt% Al2O3) ceramic discs and Kovar parts were sealed together by the process. Tensile strengths of sealing layers were measured. The layers were examined by opical and scanning type electron microscope and by electron probe microanalyzer.<br>The results were as follows:<br>1) Tensile strengh of the sealing layers was the highest when the ceramics were metallized at 1450°C for 60minutes.<br>2) The sealing layers were formed by many layers which were arranged in the following order;<br>Ceramic-Intermediate layer-Metallizing layer-Ni plating layer-Hard solder-Ni plating layer-Kovar.<br>The intermediate layer was composed of Al2O3, MnO and MgO together with small amounts of SiO2 and CaO. Main crystalline phase in the layer was MnO⋅Al2O3. The thickness of the layer was proportional to that of the adjacent metallizing layer.<br>3) Pores in the Mo-Mn metallizing layer were filled with glass phase and nickel; the former came out from ceramic and the later from nickel-plating layer. Infiltration and interdiffusion of these materials formed strong and vacuum-tight sealing layers.

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