プラズマ真空蒸着法により作製した窒化鉄膜の熱処理効果

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  • Annealing Effects of Iron Nitride Thin Film Grown by Plasma-Assisted Evaporation Technique

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Fe-N films were synthesized by a plasma-assisted deposition technique and annealing effects were investigated. X-ray diffraction (XRD) showed that the as-deposited films consist of the FexN (2≤x≤3) mixed phases. After annealing the as-deposited film at 500°C, the saturation magnetization increased to 2.5 Wb/m2 which is larger than that of pure Fe (4 πMs=2.1 Wb/m2). The XRD patterns of the film annealed at 500°C indicated the existence of Fe4N and Fe or Fe16N2 phases where the diffraction patterns of Fe and Fe16N2 could not be distinguished from each other, however, the diffraction patterns obtained by transmission electron microscopy (TEM) confirm the formation of Fe16N2 phase in the film.

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