Microstructure of Sol-Gel ZnO Thin Films Fabricated Using Ethanolamine and Hydroxyketone Modifiers

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  • OHYA Yutaka
    Department of Materials Science and Technology, Gifu University
  • OGATA Takatomo
    Department of Materials Science and Technology, Gifu University
  • BAN Takayuki
    Department of Materials Science and Technology, Gifu University
  • TAKAHASHI Yasutaka
    Department of Materials Science and Technology, Gifu University

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  • エタノールアミンとヒドロキシケトンを修飾剤としゾル-ゲル法によって作製した酸化亜鉛薄膜の微構造

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Abstract

Zinc oxide thin films were fabricated via a sol-gel method using zinc acetate as a starting reagent. The precursors used were modified with ethanolamines and/or α-hydroxyketones, and their derivatives. Oriented films with the c-axis perpendicular to the substrate were obtained from the sols modified with monoethanolamine and co-modified with monoethanolamine and acetoin. The co-modified specimens exhibited higher degrees of orientation. The film from the sol modified with monoethanolamine crystallized at the low temperature of 400°C and had an unusual plicated structure. The co-modification with acetol and hydrazine was also applicable to the sol-gel zinc oxide film. The c-axis orientation and the plicated structure of the films from the sol modified with monoethanolamine were discussed on the basis of the thermal analysis.<br>

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