溶融ケイ素から育成したβ‐Ｓｉ３Ｎ４単結晶の精製

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タイトル別名
  • Refinement of .BETA.-Si3N4 Single Crystal Grown from Silicon Melt.
  • ヨウユウ ケイソ カラ イクセイ シタ ベータ Si3N4タンケッショウ ノ セイセイ

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Silicon powder in a reaction-sintered silicon nitride crucible was heated at 1600°C in a nitrogen atomosphere. Clustered β-Si3N4 single crystals were obtained in residual silicon metal after cooling. The silicon residuals were dissolved by chemical purification using a mixture of aqueous HF and HNO3, and subsequently treated and with H2SO4. Scanning electron microscopy observation showed that large β-Si3N4 crystals without Si residuals could be successfully separated by this process.

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