窒化アルミニウムの焼結過程と熱伝導率に及ぼす粉末特性の影響

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タイトル別名
  • Influence of Powder Characteristics on Sintering Process and Thermal Conductivity of Aluminum Nitride Ceramics
  • チッカ アルミニウム ノ ショウケツ カテイ ト ネツ デンドウリツ ニ オヨ

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説明

The sinterability and thermal conductivity of Y2O3 doped AlN powders with diverse specific surface areas (42-2.9m2g-1) and oxygen contents (0.2-2mass%) were evaluated. It was found that sintering of fine powders induces the densification at lower processing temperatures, and for raw AlN powders with specific surface area larger than 20m2g-1 and oxygen content higher than 1.1mass%, densified specimens were obtained by sintering at 1650°C for 4h. However, the resultant thermal conductivity of AlN specimens fabricated from fine powders was extremely lower than the theoretical thermal conductivity of AlN, at a level of 80Wm-1K-1. The deterioration of the thermal conductivity has been attributed to the agglomeration of primary particles, and to subsequent formation of oxygenrelated defect in grown AlN grains occurring at an early stage of sintering.

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