書誌事項
- タイトル別名
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- Correlation between Gas Sensing Properties and Preferential Orientations of Sputtered Tin Oxide Films
- サンカ スズ スパッタ ハクマク ニ オケル ガス カンド トクセイ ト リュ
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抄録
Investigations on preferential orientation of tin oxide films were carried out under various conditions of film fabrication from the view point of the effect on sensing mechanism. The preferential orientation of (110) crystallographic plane resulted in the increase of sensitivity for H2 gas. The observed relationship between the sensitivity and preferential orientation has been understood by considering the maximum atomic density on the (110) plane, which ensures the large numbers of adsorption sites for atomospheric gas as well as of direct reaction sites for H2 gas.
収録刊行物
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- Journal of the Ceramic Society of Japan (日本セラミックス協会学術論文誌)
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Journal of the Ceramic Society of Japan (日本セラミックス協会学術論文誌) 100 (1165), 1165-1168, 1992
公益社団法人 日本セラミックス協会
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詳細情報 詳細情報について
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- CRID
- 1390282680253430528
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- NII論文ID
- 110002290094
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- NII書誌ID
- AN10040326
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- ISSN
- 18821022
- 09145400
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- NDL書誌ID
- 3784290
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- データソース種別
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- JaLC
- NDL
- Crossref
- CiNii Articles
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- 抄録ライセンスフラグ
- 使用不可