Reactive Solid-Phase Epitaxy: A Powerful Method for Epitaxial Film Growth of Complex Layered Oxides

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  • OHTA Hiromichi
    Graduate School of Engineering, Nagoya University CREST, Japan Science and Technology Agency (JST) ERATO-SORST, Japan Science and Technology Agency (JST), in Frontier Collaborative Research Center (FCRC)

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  • 反応性固相エピタキシャル成長法 : 層状複合酸化物の高品質エピタキシャル薄膜を作製するための強力な手法
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High-quality epitaxial film growth for several complex oxides having layered structure by “Reactive Solid-Phase-Epitaxy (R-SPE1))” is reviewed. Materials focused are InGaO3(ZnO)m (m=integer), LaCuOS and NaxCoO2 (x~0.8). For the epitaxial film growths of the complex systems with a complicated layered crystal structure, it is necessary to form an epitaxial template layer before the film deposition, followed by the thermal annealing of the bilayer films. The layers subsequently deposited on the template layer may be amorphous, polycrystalline or powder, which allows control of the epitaxially grown films in the R-SPE method.<br>

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