白金担持アルミナセラミック触媒を用いたマイクロ熱電式水素センサー

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  • Pt Loaded Alumina Ceramic Catalysts for Micro Thermoelectric Hydrogen Sensors

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The micro-thermoelectric hydrogen sensor (micro-THS) detects the hydrogen gas working with the thermoelectric effect of SiGe thin film and the Pt-catalyzed exothermic reaction of hydrogen oxidation. Integration of Pt/alumina ceramic catalyst on the membrane of the micro-THS was evitable to ensure the high sensitivity and long-term stability of the sensor. The various compositions of Pt/alumina ceramic catalysts were milled by a ball-mill technique to improve the dispersion of the catalyst, and were mixed with conventional organic vehicle like paste. The paste was deposited on micro-THS using dispenser method and the effects of the ball-mill technique and catalyst composition on the sensitivity, ΔVs, of the micro-THS for the hydrogen/air mixture gas flow were investigated. The shape of ceramic catalyst became uniform, and agglomeration of catalyst powder could not be observed using ball-mill technique. The 10 mass% Pt/alumina ceramic catalyst was the optimized platinum content of the ball-milled powder paste, and the micro-THS with this catalyst produced the larger voltage signal of 12.2 mV at the operating temperature of 100°C.<br>

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