Preparation of Stabilizing Solution for PZT Film by CSD-Method

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  • ＣＳＤ法によるＰＺＴ薄膜作製のための安定溶液の調製
  • CSDホウ ニ ヨル PZT ハクマク サクセイ ノ タメ ノ アンテイ ヨウエキ ノ チョウセイ

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Abstract

We attempted to manufacture long life span stabilizing solution for obtain PZT precursor and/or filmy lead zirconate titanate, Pbx(ZryTi1-y)O3. The precursor solutions were synthesized by using the original solution of Pb-acetate, Ti- and Zr-alkoxide and four kinds of stabilizers, DBU, 2-ethylhexanoic acid, ammonia and acetic acid. The DBU contained precursor solution is mostly stable compared with that of the solutions contained other stabilizers, and its DBU contained solution can stand for at least over one year. Thick PZT film of (100) orientation with 0.22 μm thickness was made on PTO/Pt/SiO2/Si substrate by using CSD-method from DBU contained precursor solution. For this film, the estimated electrical resistivity was 6.2×1010 Ω•cm, the dielectric constant of 1300 and the residual polarity, Pr, of 21.1 μC/cm2.<br>

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