窒化ケイ素の焼成過程に及ぼす水熱処理の影響

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タイトル別名
  • Effects of Hydrothermal Treatment on Firing Process of Silicon Nitride Ceramics
  • チッカ ケイソ ノ ショウセイ カテイ ニ オヨボス スイネツ ショリ ノ エ

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The firing behavior of α-Si3N4 powder corroded under hydrothermal conditions was investigated by X-ray diffraction (XRD) and transmission electron microscopy (TEM). XRD and TEM analysis suggest that the hydorothermal treatment enhances the α-β phase transition in α-Si3N4 and the formation of Si2ON2 phase from α-Si3N4 during firing at high temperature. In paticular, TEM analysis indicate that the grown β-Si3N4 grains contain an α-Si3N4 core under the α-β phase transition in α-Si3N4.

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