Preparation of Ni-Zn Ferrite Thin Films by ICP Flash Evaporation Method
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- SAKURAI Osamu
- Department of Inorganic Materials, Faculty of Engineering, Tokyo Institute of Technology
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- KUMAGAI Kazumasa
- Department of Inorganic Materials, Faculty of Engineering, Tokyo Institute of Technology
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- KIEDA Nobuo
- Department of Material Science and Ceramics, Shonan Institute of Technology
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- OGURA Atsushi
- Ogura Laboratory
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- SHINOZAKI Kazuo
- Department of Inorganic Materials, Faculty of Engineering, Tokyo Institute of Technology
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- MIZUTANI Nobuyasu
- Department of Inorganic Materials, Faculty of Engineering, Tokyo Institute of Technology
Bibliographic Information
- Other Title
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- ICPフラッシュ蒸着法によるNi-Znフェライト薄膜の合成
- ICP フラッシュ ジョウチャクホウ ニ ヨル Ni Zn フェライト ハクマ
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Abstract
Ni-Zn ferrite thin films were prepared on fused silica plates by an inductively coupled plasma (ICP) flash evaporation method using ultrasonically atomized aqueous solutions of corresponding metal ions in the reduced Ar gas of 30kPa. All the films consisted same-size columnar particles and the particle size increased from 0.1 to 0.5μm in diameter with deposition time. The growth rate of the films was about 2.9μm/h. In this method, the metal composition agreed with that of the starting solution. Therefore, the ICP flash evaporation method using the mists of aqueous solutions was more advantageous to control the composition of complex metal oxide films than the method using the mixed oxide powders.
Journal
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- Journal of the Ceramic Society of Japan
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Journal of the Ceramic Society of Japan 101 (1180), 1423-1426, 1993
The Ceramic Society of Japan
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Keywords
Details 詳細情報について
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- CRID
- 1390282680255010688
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- NII Article ID
- 110002288010
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- NII Book ID
- AN10040326
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- ISSN
- 18821022
- 09145400
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- NDL BIB ID
- 3852084
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- Data Source
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- JaLC
- NDL
- Crossref
- CiNii Articles
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- Abstract License Flag
- Disallowed