Synthesis and Pyrolysis of Polyborosilazane with Low Oxygen Content

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  • FUNAYAMA Osamu
    Corporate Research and Development Laboratory, Tonen Corporation
  • AOKI Tomoko
    Corporate Research and Development Laboratory, Tonen Corporation
  • ISODA Takeshi
    Corporate Research and Development Laboratory, Tonen Corporation

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  • 低酸素含有ポリボロシラザンの合成と熱分解
  • Synthesis and Pyrolysis of Polyborosila

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Abstract

Polyborosilazane with a low oxygen content was synthesized by reacting perhydrosilazane with tris (dimethylamino) borane. The chemical structure of this polymer was investigated by infrared and nuclear magnetic resonance spectroscopies. The borazine ring structure was observed in the polymer. Amorphous silicon nitride was obtained by pyrolysis of this polymer in a stream of N2 at 1000°C with about 80mass% ceramic yield. The pyrolysis product remained amorphous after further heating to 1700°C under N2. The oxygen content in the pyrolysis product was 1.1mass%. Crystallization to β-Si3N4, β-SiC and α-Si3N4 took place on annealing in N2 at 1800°C for 1h. These results indicate that this polyborosilazane is a good precursor for amorphous silicon nitride-based materials with low oxygen content.

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