書誌事項
- タイトル別名
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- Photopatterning of Titanium Oxide Gel Films Prepared from Titanium Alkoxide Modified with Hydroxyl-Substituted Aromatic Ketones
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説明
TiO2 gel films were prepared from titanium tetra-n-butoxide modified with 1-(2-hydroxyphenyl)-3-phenyl-2-propen-1-one in 1-butanol by the sol-gel method. The obtained gel film showed an absorption band, characteristic of the chelate ring, at 425 nm. The absorption band was shifted to the longest wavelength region in the photosensitive gel films which we have examined. The band gradually decreased in intensity by UV-irradiation using a high pressure mercury lamp. This indicates that the gel film is photosensitive. Using the photosensitivity, fine patterns (about 3 μm) could be fabricated by the UV-irradiation through a mask and leaching.<br>
収録刊行物
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- Journal of the Ceramic Society of Japan (日本セラミックス協会学術論文誌)
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Journal of the Ceramic Society of Japan (日本セラミックス協会学術論文誌) 114 (1327), 238-240, 2006
公益社団法人 日本セラミックス協会
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詳細情報 詳細情報について
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- CRID
- 1390282680255900160
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- NII論文ID
- 110004656832
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- NII書誌ID
- AN10040326
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- ISSN
- 18821022
- 09145400
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- NDL書誌ID
- 7864669
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- 本文言語コード
- en
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- データソース種別
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- JaLC
- NDLサーチ
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- 抄録ライセンスフラグ
- 使用不可