Synthesis of ZrN Thin Film by a New Carbothermal Nitridation Method of Sol-Gel Derived ZrO2
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- YAMAMURA Hiroshi
- Department of Applied Chemistry, Faculty of Engineering, Kanagawa University
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- YAMAMOTO Masayuki
- Department of Applied Chemistry, Faculty of Engineering, Kanagawa University
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- KAKINUMA Katsuyoshi
- Department of Applied Chemistry, Faculty of Engineering, Kanagawa University
Bibliographic Information
- Other Title
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- ゾル-ゲル法由来 ZrO<sub>2</sub> の新熱炭素還元法による ZrN 薄膜の合成
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Abstract
ZrO2 gel film was prepared by spin-coating of Zr sol from Zr-n-propoxide, n-propanol, acetylacetone, water and nitric acid, on various substrates such as polycrystalline Al2O3, and single crystals of Al2O3, SrTiO3, 8 mol% Y2O3 doped ZrO2 (YSZ) and MgO. The dried-gel film on Al2O3 substrate was transformed to cubic ZrN single phase with bright gold-color by a new carbothermal nitridation method, in which the thin film was covered with a porous graphite crucible to realize a strong reducing atmosphere was fired in flowing nitrogen gas at a fairly high temperatures above 1673 K. The ZrN thin film thus obtained was characterized by means of X-ray diffractometry (XRD), scanning electron microscopy (SEM) observation, reflection spectra.<br>
Journal
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- Journal of the Ceramic Society of Japan
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Journal of the Ceramic Society of Japan 113 (1319), 458-461, 2005
The Ceramic Society of Japan
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Details 詳細情報について
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- CRID
- 1390282680256001280
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- NII Article ID
- 110002292334
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- NII Book ID
- AN10040326
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- ISSN
- 18821022
- 09145400
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- NDL BIB ID
- 7413836
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- Text Lang
- en
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- Data Source
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- JaLC
- NDL
- Crossref
- CiNii Articles
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- Abstract License Flag
- Disallowed