書誌事項
- タイトル別名
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- A simple algorithm for the absolute calibration of flatness using a three flat test
- サンマイ アワセホウ ニ ヨル ヘイメンド ゼッタイ コウセイ アルゴリズム
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抄録
Absolute calibration of the reference flats installed in flatness interferometers is important to reduce measurement uncertainty and keep traceability of flatness measurement. A three flat test is a common method to derive absolute shape of flatness, but in the calculation process complicated least square calculations are required. A simple arithmetic formula is proposed to derive the absolute shape of the flat followed by experimental results to validate the formula and assess measurement uncertainty.
収録刊行物
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- 精密工学会誌論文集
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精密工学会誌論文集 72 (11), 1368-1373, 2006
公益社団法人 精密工学会
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詳細情報 詳細情報について
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- CRID
- 1390282680256787968
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- NII論文ID
- 110004837662
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- NII書誌ID
- AA11966630
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- ISSN
- 18818722
- 13488716
- 13488724
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- NDL書誌ID
- 8568189
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- データソース種別
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- JaLC
- NDL
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