A simple algorithm for the absolute calibration of flatness using a three flat test

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  • 三枚合わせ法による平面度絶対校正アルゴリズム
  • サンマイ アワセホウ ニ ヨル ヘイメンド ゼッタイ コウセイ アルゴリズム

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Abstract

Absolute calibration of the reference flats installed in flatness interferometers is important to reduce measurement uncertainty and keep traceability of flatness measurement. A three flat test is a common method to derive absolute shape of flatness, but in the calculation process complicated least square calculations are required. A simple arithmetic formula is proposed to derive the absolute shape of the flat followed by experimental results to validate the formula and assess measurement uncertainty.

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