FIB Etching of Glass-Like Carbon Die and Mold Press of Micro Glass Lens

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  • ガラス状炭素成形型の FIB加工とマイクロガラスレンズのモールド成形
  • ガラスジョウ タンソ セイケイガタ ノ FIB カコウ ト マイクロガラスレンズ ノ モールド セイケイ

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To produce micro glass lens by mold-press, 3D micro lens die was fabricated on glass-like carbon (GC) by focused ion beam (FIB) etching. The dimensional accuracy and surface roughness, as well as transcriptional performance, were investigated. A precise and smooth die was completed by optimizing dwell time, current and step number of 2D bit map data, which agreed well with theoretical estimation. Micro glass lenses with different diameter and gradient angle were mold-pressed using the GC die. The diameter and sag were confirmed to be nearly equivalent to or just smaller than those of GC die.

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