Formation of zirconia films by the aerosol gas deposition method

DOI Web Site Web Site 被引用文献16件 参考文献10件
  • FUCHITA Eiji
    Fuchita Nanotechnology, Ltd. National Institute for Materials Science
  • TOKIZAKI Eiji
    Fuchita Nanotechnology, Ltd. National Institute for Materials Science
  • SAKKA Yoshio
    National Institute for Materials Science

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Recently, zirconia films have attracted considerable attention because of their potential applications in solid oxide fuel cells and as thermal barrier coatings and oxygen sensors. Herein, we report that high-density zirconia films can be formed at room temperature by using the aerosol gas deposition (AGD) technique and discuss the conditions required for film formation. The experimental results indicate that the particle size and specific surface area of the zirconia powder used determine the success of film fabrication by AGD. Films are successfully formed when the mean particle size and specific surface area of the powder are in the range 2.1–3.5 µm and 4.4–6.5 m2/g, respectively.

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