Selective growth of gold nanoparticles on FIB-induced amorphous phase of Si substrate
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- MATSUOKA Tomoyo
- Department of Material Chemistry, Graduate School of Engineering, Kyoto University
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- NISHI Masayuki
- Department of Material Chemistry, Graduate School of Engineering, Kyoto University
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- SHIMOTSUMA Yasuhiko
- Innovative Collaboration Center, Kyoto University
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- MIURA Kiyotaka
- Department of Material Chemistry, Graduate School of Engineering, Kyoto University
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- HIRAO Kazuyuki
- Department of Material Chemistry, Graduate School of Engineering, Kyoto University
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Abstract
Maskless and electroless patterning of gold was performed by a simple method: 3-mercaptopropyltrimethoxysilane (MPTMS) and an aqueous solution of hydrogen tetrachloroaurate (HAuCl4·4H2O) were reacted, and the obtained solution was dropped onto a silicon substrate processed by a focused ion beam (FIB). This method utilizes the selective growth of gold nanoparticles on an FIB-processed area of a silicon surface. Raman microspectroscopy revealed that gold nanoparticles selectively grew on an FIB-processed area when an amorphous silicon phase was induced by an FIB. Unlike other attempts to fabricate metal patterns with silane coupling agents, MPTMS acts as a reducing agent, not as glue.
Journal
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- Journal of the Ceramic Society of Japan
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Journal of the Ceramic Society of Japan 118 (1379), 575-578, 2010
The Ceramic Society of Japan
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Keywords
Details 詳細情報について
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- CRID
- 1390282680263010432
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- NII Article ID
- 130000304592
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- NII Book ID
- AA12229489
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- COI
- 1:CAS:528:DC%2BC3cXpt1yhsro%3D
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- ISSN
- 13486535
- 18820743
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- HANDLE
- 2433/148416
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- NDL BIB ID
- 10731974
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- Text Lang
- en
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- Data Source
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- JaLC
- IRDB
- NDL
- Crossref
- CiNii Articles
- KAKEN
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- Abstract License Flag
- Disallowed