Sol-gel synthesis of fluorine-doped silica glasses with low SiOH concentrations

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  • MAEHANA Ryohei
    Department of Applied Chemistry, Graduate School of Urban Environmental Sciences, Tokyo Metropolitan University
  • KUWATANI Shungo
    Department of Applied Chemistry, Graduate School of Urban Environmental Sciences, Tokyo Metropolitan University
  • KAJIHARA Koichi
    Department of Applied Chemistry, Graduate School of Urban Environmental Sciences, Tokyo Metropolitan University
  • KANAMURA Kiyoshi
    Department of Applied Chemistry, Graduate School of Urban Environmental Sciences, Tokyo Metropolitan University

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Fluorine-doped monolithic silica glasses with low SiOH concentrations were prepared by a sol–gel method using hydrofluoric acid as a fluorine source. Without employing dehydration of dried gels using halogen-containing gases, or vacuum sintering, the concentration of SiOH groups was reduced to ∼1017 cm−3 (∼1 ppmw), which is comparable to that of synthetic silica glasses mildly dehydrated during their vapor-phase synthesis. The fluorine concentration evaluated from the intensity of the Raman band of SiF groups (∼945 cm−1) was in the order of ∼1020–1021 cm−3.

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