Growth of Spherical Carbon Particles in the Vertically Excited Columnar Plasma Sheath

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  • NAKAYAMA Taisuke
    Department of Electrical and Electronic Engineering, Kyushu Institute of Technology
  • SUGA Yuji
    Graduate School of Life Science and Systems Engineering, Kyushu Institute of Technology
  • NAGATOMO Kazuki
    Department of Electrical and Electronic Engineering, Kyushu Institute of Technology
  • IKARI Tomonori
    Ube National College of Technology
  • NAITOH Masamichi
    Graduate School of Life Science and Systems Engineering, Kyushu Institute of Technology
  • NAGAI Tatsuzo
    Kyushu Kyoritsu University Research Institute
  • SHOJI Fumiya
    Kyushu Kyoritsu University Research Institute

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Other Title
  • 鉛直柱状プラズマシースにおける球状カーボン微粒子の成長
  • エンチョク チュウジョウ プラズマシース ニ オケル キュウジョウ カーボン ビリュウシ ノ セイチョウ

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  We have investigated the generation of spherical carbon particles, using the columnar type plasmas excited vertically at the pressure of 1×10−1 Pa composed of CH4-Ar mixed gas. It is found that the spherical carbon particles of micrometer sizes grow in the plasma sheath only when Si(100) substrate temperature and contents of CH4 are near 1066 K and near 18%, respectively. The result of high resolution SEM and high resolution TEM observations strongly suggest the growth of elementary particles of ca. 10 nm which including carbon onions of ca. 2-4 nm in the plasma.<br>

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