Growth of Spherical Carbon Particles in the Vertically Excited Columnar Plasma Sheath
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- NAKAYAMA Taisuke
- Department of Electrical and Electronic Engineering, Kyushu Institute of Technology
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- SUGA Yuji
- Graduate School of Life Science and Systems Engineering, Kyushu Institute of Technology
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- NAGATOMO Kazuki
- Department of Electrical and Electronic Engineering, Kyushu Institute of Technology
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- IKARI Tomonori
- Ube National College of Technology
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- NAITOH Masamichi
- Graduate School of Life Science and Systems Engineering, Kyushu Institute of Technology
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- NAGAI Tatsuzo
- Kyushu Kyoritsu University Research Institute
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- SHOJI Fumiya
- Kyushu Kyoritsu University Research Institute
Bibliographic Information
- Other Title
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- 鉛直柱状プラズマシースにおける球状カーボン微粒子の成長
- エンチョク チュウジョウ プラズマシース ニ オケル キュウジョウ カーボン ビリュウシ ノ セイチョウ
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Abstract
We have investigated the generation of spherical carbon particles, using the columnar type plasmas excited vertically at the pressure of 1×10−1 Pa composed of CH4-Ar mixed gas. It is found that the spherical carbon particles of micrometer sizes grow in the plasma sheath only when Si(100) substrate temperature and contents of CH4 are near 1066 K and near 18%, respectively. The result of high resolution SEM and high resolution TEM observations strongly suggest the growth of elementary particles of ca. 10 nm which including carbon onions of ca. 2-4 nm in the plasma.<br>
Journal
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- Journal of the Vacuum Society of Japan
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Journal of the Vacuum Society of Japan 57 (4), 155-158, 2014
The Vacuum Society of Japan
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Details
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- CRID
- 1390282680270360832
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- NII Article ID
- 130004952509
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- NII Book ID
- AA12298652
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- ISSN
- 18824749
- 18822398
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- NDL BIB ID
- 025460267
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- Text Lang
- ja
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- Data Source
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- JaLC
- NDL
- Crossref
- CiNii Articles
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- Abstract License Flag
- Disallowed