Growth of Spherical Carbon Particles in the Vertically Excited Columnar Plasma Sheath

DOI 10 References
  • NAKAYAMA Taisuke
    Department of Electrical and Electronic Engineering, Kyushu Institute of Technology
  • SUGA Yuji
    Graduate School of Life Science and Systems Engineering, Kyushu Institute of Technology
  • NAGATOMO Kazuki
    Department of Electrical and Electronic Engineering, Kyushu Institute of Technology
  • IKARI Tomonori
    Ube National College of Technology
  • NAITOH Masamichi
    Graduate School of Life Science and Systems Engineering, Kyushu Institute of Technology
  • NAGAI Tatsuzo
    Kyushu Kyoritsu University Research Institute
  • SHOJI Fumiya
    Kyushu Kyoritsu University Research Institute

Bibliographic Information

Other Title
  • 鉛直柱状プラズマシースにおける球状カーボン微粒子の成長
  • エンチョク チュウジョウ プラズマシース ニ オケル キュウジョウ カーボン ビリュウシ ノ セイチョウ

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Abstract

  We have investigated the generation of spherical carbon particles, using the columnar type plasmas excited vertically at the pressure of 1×10−1 Pa composed of CH4-Ar mixed gas. It is found that the spherical carbon particles of micrometer sizes grow in the plasma sheath only when Si(100) substrate temperature and contents of CH4 are near 1066 K and near 18%, respectively. The result of high resolution SEM and high resolution TEM observations strongly suggest the growth of elementary particles of ca. 10 nm which including carbon onions of ca. 2-4 nm in the plasma.<br>

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Details

  • CRID
    1390282680270360832
  • NII Article ID
    130004952509
  • NII Book ID
    AA12298652
  • DOI
    10.3131/jvsj2.57.155
  • ISSN
    18824749
    18822398
  • NDL BIB ID
    025460267
  • Text Lang
    ja
  • Data Source
    • JaLC
    • NDL
    • Crossref
    • CiNii Articles
  • Abstract License Flag
    Disallowed

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