Transparent Conducting Titanium-Doped Zinc Oxide Films Deposited on Organic Substrates

DOI BIBCODE 7 References
  • KONDO Tsuyoshi
    Department of Electronics, Information and Communication Engineering, College of Engineering, Osaka Sangyo University
  • AOKI Takanori
    Department of Electronics, Information and Communication Engineering, College of Engineering, Osaka Sangyo University
  • SUZUKI Akio
    Department of Electronics, Information and Communication Engineering, College of Engineering, Osaka Sangyo University

Bibliographic Information

Other Title
  • 有機基板上に成膜した TZO 透明導電膜に関する研究

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Description

  Approximately 500 nm-thick transparent conducting films applicable to the whole solar spectrum have been prepared on flexible cyclo-orephin polymer (COP) substrates by irradiating the pulsed laserbeam of an ArF excimer laser (λ=193 nm, laser energy of 80 mJ, repetition rate of 10 Hz) on the titanium-doped zinc oxide (TZO : 1 wt.% Ti2O3) target. The deposition cell was initially evacuated to ∼10−4 Pa and then, film deposition was performed at oxygen partial pressure of 0.5 Pa, oxygen flow rate of 15 sccm and substrate temperature of 150℃. As a result, the lowest resistivity of 2.9×10−4 Ω•cm（μ=42 cm2/V•s, n=5.2×1020 cm−3) and sheet resistance of 5.7 Ω/sq were obtained. The values of average transmittance spectra were 84% in the visible wavelength region (400-700 nm) and 79% in the whole solar spectra (400-1500 nm), respectively.<br>

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Details 詳細情報について

  • CRID
    1390282680270473216
  • NII Article ID
    10031122234
  • NII Book ID
    AN00119871
  • DOI
    10.3131/jvsj2.55.454
  • BIBCODE
    2012JVSJ...55..454K
  • COI
    1:CAS:528:DC%2BC38XhvFShsrfE
  • ISSN
    18824749
    18822398
  • Text Lang
    ja
  • Data Source
    • JaLC
    • Crossref
    • CiNii Articles
  • Abstract License Flag
    Disallowed

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