書誌事項
- タイトル別名
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- Nano Fabrication of Functional Transition Metal Oxide Thin Films
- キノウセイ センイ キンゾク サンカブツ ハクマク ノ キョクゲン ナノ カコウ
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抄録
Transition metal oxide films show a rich variety of peculiar properties, such as ferroelectricity, ferromagnetism, high Tc superconductivity, colossal magnetoresistance, and so on. The method to process the oxide films down to nano scale is still under development. In this paper we introduce several techniques to process oxide films on the basis of AFM lithography and nanoimprint lithography. Using AFM based lithography, nanostructures of several tens nanometers have been realized. By Mo lift-off technique with nanoimprint lithography, we have obtained a large area dot array whose dot size is ~120 nm. These methods will lead to various room temperature functional oxide devices operated by light, electric field, magnetic field, and so on.<br>
収録刊行物
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- Journal of the Vacuum Society of Japan
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Journal of the Vacuum Society of Japan 51 (1), 37-43, 2008
一般社団法人 日本真空学会
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詳細情報 詳細情報について
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- CRID
- 1390282680270638976
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- NII論文ID
- 10021156618
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- NII書誌ID
- AA12298652
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- ISSN
- 18824749
- 18822398
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- NDL書誌ID
- 9382958
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- データソース種別
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- JaLC
- NDL
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- CiNii Articles
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- 抄録ライセンスフラグ
- 使用不可