Development of Noncontact Atomic Force Microscopy Operating at Low Temperatures
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- SUGAWARA Yasuhiro
- Graduate School of Engineering, Osaka University
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- NAITOH Yoshitaka
- Graduate School of Engineering, Osaka University
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- KAGESHIMA Masami
- Graduate School of Engineering, Osaka University
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- LI Yan Jun
- Graduate School of Engineering, Osaka University
Bibliographic Information
- Other Title
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- 極低温環境における原子分解能非接触原子間力顕微鏡計測技術
- キョクテイオン カンキョウ ニ オケル ゲンシ ブンカイノウ ヒセッショク ゲンシカンリョク ケンビキョウ ケイソク ギジュツ
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Abstract
Noncontact atomic force microscopy (NC-AFM) using frequency modulation detection method has been widely used to investigate the various surfaces with atomic resolution. In this paper, we introduce the measurement technique of NC-AFM operating at low temperatures (LTs). First, we theoretically discuss the enhancement of the force sensitivity in NC-AFM operating at LTs. Then, we present the design and performance of LT-NC-AFM using fiber optic interferometer with quick sample and cantilever exchange mechanism. We also show the present status of the LT-NC-AFM imaging. In detail, we show the experimental results to investigate the influence of the surface stress around an SA step of Si(001) surface onto the buckled dimer at 5 K. We demonstrate that the LT-NC-AFM has a capability to detect the surface stress with atomic resolution.<br>
Journal
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- Journal of the Vacuum Society of Japan
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Journal of the Vacuum Society of Japan 51 (12), 789-795, 2008
The Vacuum Society of Japan
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Details 詳細情報について
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- CRID
- 1390282680270895232
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- NII Article ID
- 10024858334
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- NII Book ID
- AA12298652
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- ISSN
- 18824749
- 18822398
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- NDL BIB ID
- 9762604
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- Text Lang
- ja
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- Data Source
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- JaLC
- NDL
- Crossref
- CiNii Articles
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- Abstract License Flag
- Disallowed