Development of Domestic Spherical Aberration Correction Electron Microscope, R005

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  • TANISHIRO Yasumasa
    Japan Science and Technology Agency, CREST Departement of Condensed Matter Physics, Tokyo Institute of Technology
  • KONDO Yukihito
    Japan Science and Technology Agency, CREST JEOL Ltd.
  • TAKAYANAGI Kunio
    Japan Science and Technology Agency, CREST Departement of Condensed Matter Physics, Tokyo Institute of Technology

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  • 国産球面収差補正電子顕微鏡　Ｒ００５の開発
  • コクサン キュウメン シュウサ ホセイ デンシ ケンビキョウ R005 ノ カイハツ

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  A domestic spherical aberration corrected 300 kV transmission electron microscope named R005, which stands for 0.05 nm resolution, was developed. It has double aberration correctors in probe-forming and image-forming systems for high-resolution scanning transmission electron microscope (STEM) and conventional transmission electron microscope (TEM) observation. Asymmetric corrector optic system was developed to compress the parasitic aberration and the increase of chromatic aberration. Automatic aberration correction systems for STEM and TEM have been implemented. Neighboring atomic columns of Ga (63 pm spacing) in a GaN [211] crystalline specimen was resolved in a high angle annular dark field (HAADF) STEM image for the first time.<br>

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