Surfaces in Vacuum Technology

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  • 真空と表面
  • シンクウ ト ヒョウメン

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Abstract

  Any vacuum chamber has interior surfaces of the chamber facing toward the vacuum. Interaction of gas molecules with the chamber surface including scattering, adsorption and desorption is thus of particular importance for vacuum technology. The present article describes fundamental concepts of gas-surface interaction, which encompass the thermal accommodation coefficient, cosine law, adsorption potential, mean time of sojourn and adsorption isotherm.<br>

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