In-situ Measurement of the Effective Pumping Speed of High Vacuum Pump and the Sensitivity of Ionization Gauge by Combining the Standard Conductance Element and the Conductance Modulation Method

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  • YOSHIDA Hajime
    National Metrology Institute of Japan, National Institute of Advanced Industrial Science and Technology (NMIJ/AIST)
  • AKIMICHI Hitoshi
    National Metrology Institute of Japan, National Institute of Advanced Industrial Science and Technology (NMIJ/AIST)
  • KOBATA Tokihiko
    National Metrology Institute of Japan, National Institute of Advanced Industrial Science and Technology (NMIJ/AIST)

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Other Title
  • 標準コンダクタンスエレメントとコンダクタンス変調法の組み合わせによる高真空ポンプの実効排気速度と電離真空計の感度のその場測定法
  • ヒョウジュン コンダクタンスエレメント ト コンダクタンス ヘンチョウホウ ノ クミアワセ ニ ヨル コウシンクウ ポンプ ノ ジッコウ ハイキ ソクド ト デンリ シンクウケイ ノ カンド ノ ソノ バ ソクテイホウ

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  The method for in-situ measurements of the effective pumping speed of high vacuum pumps and the sensitivity of ionization gauges has been developed. The measurement system consists of the gas introduction device with the standard conductance element, and the pumping system with the conductance modulation method. The effective pumping speed of turbomolecular pump, the inverse of the correction factor of ionization gauges, and the effective accommodation coefficient of the spinning rotor gauge were measured by using fifteen kinds of gas species including water vapor. The uncertainty of the measurement was evaluated to be around ten percent. The obtained results are consistent with the conventional literature values within the measurement uncertainties.<br>

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