The Application Example of Direct Simulation Monte Carlo Method to Turbo-molecular Pump
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- TSUTSUI Shingo
- Shimadzu Corporation
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- FUTAGI Keiichi
- Shimadzu Corporation
Bibliographic Information
- Other Title
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- Direct Simulation Monte Carlo 法のターボ分子ポンプへの適用
- Direct Simulation Monte Carloホウ ノ ターボ ブンシ ポンプ エ ノ テキヨウ
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Journal
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- Journal of the Vacuum Society of Japan
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Journal of the Vacuum Society of Japan 58 (7), 253-256, 2015
The Vacuum Society of Japan
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Details 詳細情報について
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- CRID
- 1390282680272676736
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- NII Article ID
- 130005091229
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- NII Book ID
- AA12298652
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- ISSN
- 18824749
- 18822398
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- NDL BIB ID
- 026611892
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- Text Lang
- ja
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- Data Source
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- JaLC
- NDL
- Crossref
- CiNii Articles