書誌事項
- タイトル別名
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- Ozone Killer by UV-Light Irradiation for Reduced Pressure and High Concentration Ozone Gas
- シガイコウ ブンカイ ハンノウ オ モチイタ ゲンアツ コウノウド オゾンガス ブンカイ ソウチ
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抄録
We have developed a high efficiency ozone killer for reduced pressure and high concentration ozone using ultra-violet (UV) light irradiation to ozone gas. The highly concentrated ozone gas (∼100%) of 30-110 Pa with a flow rate of 50 sccm† can be decomposed to the concentration as low as 5% by UV light (200 nm-300 nm, 15 mW/cm2) irradiation. However, the residual ozone gas concentration increases the supplied ozone flow rate, since ozone molecule must stay in the ozone killer to absorb a UV photon. The photo-type ozone killer can be practically applied to actual processes by optimizing the dimension of the killer for a given pressure and gas flow rate.<br>
収録刊行物
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- Journal of the Vacuum Society of Japan
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Journal of the Vacuum Society of Japan 52 (4), 245-247, 2009
一般社団法人 日本真空学会
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詳細情報 詳細情報について
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- CRID
- 1390282680272911360
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- NII論文ID
- 10024898260
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- NII書誌ID
- AA12298652
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- ISSN
- 18824749
- 18822398
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- NDL書誌ID
- 10302396
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- 本文言語コード
- ja
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- データソース種別
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- JaLC
- NDL
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- 抄録ライセンスフラグ
- 使用不可