表面粗さを考慮した燃焼炎3 段階合成法によるダイヤモンド皮膜合成

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  • 高橋 護
    秋田大学大学院工学資源学研究科 共同ライフサイクルデザイン工学専攻
  • 瀬川 悟志
    秋田大学大学院工学資源学研究科 共同ライフサイクルデザイン工学専攻（現：旭ダイヤモンド工業（株））
  • 神谷 修
    秋田大学大学院工学資源学研究科 機械工学専攻

書誌事項

タイトル別名
  • Synthesis of Diamond Films by Three-step Synthesis Method Using Flame Combustion Considering Surface Roughness
  • ヒョウメン アラサ オ コウリョ シタ ネンショウエン 3 ダンカイ ゴウセイホウ ニ ヨル ダイヤモンド ヒマク ゴウセイ

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抄録

  A flame combustion method enables the synthesis of diamond using acetylene-oxygen gas in ambient atmosphere. It has various advantages over other methods. We previously synthesized diamond films on a Mo substrate surface by the flame combustion method. In this method, most diamond films delaminate as a result of thermal stress during cooling. To prevent diamond film delamination for the synthesis of good diamond films, a three-step synthesis method was proposed. However, the surface roughness of synthesized diamond films by this method became large. In this study, to reduce the surface roughness of synthesized diamond films by flame combustion and to achieve good adhesion on the Mo substrate, the flow ratio of oxygen flow rate to acetylene flow rate and synthesis time of the three-step synthesis method were varied during the synthesis of diamond. We previously determined optimal ratio of oxygen flow rate (Fo = 63.8 cm3/s) to acetylene flow rate (Fa = 70.9 cm3/s) which was set to Rf = Fo/Fa = 0.90, because delamination free good crystalline growth could be obtained at Rf = 0.90. The acetylene flow rate was carefully varied in the range of 63.8-75.1 cm3/s (Rf = 0.85-1.00) of each synthesis time (10 min) of the three-step synthesis method. The oxygen flow rate was not varied, and it was 63.8 cm3/s. To investigate the surface morphology and the surface roughness of synthesized diamond films, synthesized films were observed. The flow ratio and synthesis time of the three-step synthesis method affected the surface morphology and the surface roughness of synthesized diamond films. The surface roughness of the synthesized film was reduced by the proposed method in this study. The surface roughness in the Case 3 condition was the smallest in this experiment.

収録刊行物

  • Journal of Smart Processing

    Journal of Smart Processing 5 (1), 79-85, 2016

    一般社団法人 スマートプロセス学会 （旧高温学会）

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