書誌事項
- タイトル別名
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- Measurement of the Anisotropic Elastic Constants of CVD Diamond Film and Micromechanics Modeling
- CVD ダイヤモンド マク ノ イホウセイ ダンセイ テイスウ ノ ソクテイ ト マイクロメカニクス モデリング
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説明
This paper studies the anisotropic elastic constants of a CVD polycrystalline diamond film using acoustic spectroscopy and micromechanics modeling. Many films exhibit elastic anisotropy between the film-growth direction and inplane direction and possess five independent elastic constants; they are C11, C33, C12, C13 and C44 when the x3 axis is along the film-growth direction. Combination of resonance ultrasound spectroscopy (RUS) and electromagnetic acoustic resonance (EMAR) deduces the four independent elastic constants among them, including C44 and C66, with which the elastic anisotropy is discussed. We found 5-10% anisotropy between them and considerably small elastic constants compared with an isotropic polycrystalline diamond. We attribute the anisotropy and small elastic constants of the CVD diamond film to local incomplete cohesion. This view is supported by a micromechanics calculation.
収録刊行物
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- 材料
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材料 52 (10), 1160-1165, 2003
公益社団法人 日本材料学会
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詳細情報 詳細情報について
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- CRID
- 1390282680396538496
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- NII論文ID
- 110002302011
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- NII書誌ID
- AN00096175
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- ISSN
- 18807488
- 05145163
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- NDL書誌ID
- 6739040
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- 本文言語コード
- ja
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- データソース種別
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- JaLC
- NDL
- Crossref
- CiNii Articles
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- 抄録ライセンスフラグ
- 使用不可