ArF エキシマレーザーの中空導光路伝送

DOI

書誌事項

タイトル別名
  • ArF Excimer Laser Power Delivery Through The Hollow Light Guide

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説明

The transmittance of ArF excimer lasers were improved through the Hollow Light Guide with aluminum reflector. The hollow light guide uses thin polytetra-fluoroethylene (teflon) slab and polyolefin coat as its material. The size of the guide's hollow part is 8mm width, 0.5mm height, with 100cm length. In the previous data, the transmittance and the maximum delivery laser energy of ArF laser were 50%/m and 20mJ/pulse, respectively. ArF laser damage on aluminum plate as the reflector of the hollow light guide and the transmittance have been tried in various atmosphere such as air, nitrogen, oxygen and helium. ArF laser damage of aluminum in nitrogen was the largest of atmosphere all and laser damage in helium was the smallest of them all. The transmittance of the hollow light guide in nitrogen and helium were higher than that in air and oxygen. Finally, the medium of laser delivery of the hollow light guide had better use the helium instead of the air. ArF laser transmittance was obtained 62%/m. We have tried the vacuum evaporated aluminum on phosphor bronze thin plate as the reflector. The transmittance is 85.6%at 15cm long higher than 82.4%of the aluminum plate as the previous reflector.

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詳細情報 詳細情報について

  • CRID
    1390282680430833536
  • NII論文ID
    130004702518
  • DOI
    10.2530/jslsm1980.15.supplement_97
  • ISSN
    02886200
  • 本文言語コード
    ja
  • データソース種別
    • JaLC
    • Crossref
    • CiNii Articles
  • 抄録ライセンスフラグ
    使用不可

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