Formation of Polymethylsiloxane Network between Layers of Mica by Chemical Vapor Deposition of Tetramethylcyclotetrasiloxane

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  • CVD法を用いたテトラメチルシクロテトラシロキサンによる雲母層間での網目状ポリメチルシロキサンの形成
  • CVDホウ オ モチイタ テトラメチルシクロテトラシロキサン ニ ヨル ウンモソウ カン デ ノ アミメジョウ ポリメチルシロキサン ノ ケイセイ

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Tetramethylcyclotetrasiloxane (H-4) was deposited on mica by chemical vapor deposition. As a result, weight and volume of mica increased with increasing reaction time. The results of infrared spectroscopy of H-4 treated mica showed that H-4 was polymerized by catalytic activity of mica and polymethylsiloxane (PMS) network was formed on the surface and between the layers of mica. Moreover, X-ray diffraction of H-4 treated mica indicated that the PMS films were formed between layers of mica and mica was considered to be cleaved by the PMS films.

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