微粒子投射処理と硬質薄膜形成の複合処理について

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タイトル別名
  • Combined Treatment of Fine Particle Bombarding and Hard Thin Film Coating
  • ビリュウシ トウシャ ショリ ト コウシツ ハクマク ケイセイ ノ フクゴウ ショリ ニ ツイテ

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抄録

<p>When using thin films to practical parts, not only the film properties such as hardness and lubricity, it is also necessary consider such adhesion and surface texture. There are dependent on the substrate, it is necessary to develop in consideration of properties of the substrate, such as hardness and fatigue strength. Surface modification is an effective way as the method to control the properties of the substrate material. It introduces FPB (Fine Particle Bombarding) as one of the surface modification methods. FPB is a kind of the shot peening, but is a method of projecting particles finer than normal at high speed. The projection of high-speed fine particles can bring large plastic deformation on the substrate surface. Plastic deformation causes giving of compressive remaining stress and formation of micro-dimples in a substrate material surface, and improves fatigue strength and the sliding properties.</p>

収録刊行物

  • トライボロジスト

    トライボロジスト 63 (1), 27-33, 2018

    一般社団法人 日本トライボロジー学会

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