Development of novel oxide multilayer mirrors at "water-window" wavelengths by atomic layer deposition / atomic layer epitaxy
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- Kumagai Hiroshi
- Faculty of Engineering, Osaka City University
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- Tanaka Yuji
- Faculty of Engineering, Osaka City University
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- Masuda Yusuke
- Faculty of Engineering, Osaka City University
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- Shinagawa Tsutomu
- Osaka Municipal Technical Research Institute
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- Kobayashi Ataru
- Faculty of Engineering, Osaka City University
Abstract
The authors proposed that novel oxide superlattice structures of crystalline TiO2/ZnO on sapphire substrates could be fabricated for high-reflection multilayer mirrors at 2.734 nm. In the experimental study, both rutile TiO2 (200) and wurtzite ZnO (0001) thin films were grown epitaxially on the same sapphire (0001) substrates by atomic layer epitaxy (ALE) at 450℃. the authors also demonstrated for the first time that the novel oxide superlattice structure of 10-bilayer TiO2/ZnO on a sapphire substrate gave high reflectance at 2.734 nm.
Journal
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- Transactions of the Materials Research Society of Japan
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Transactions of the Materials Research Society of Japan 34 (4), 605-608, 2009
The Materials Research Society of Japan
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Keywords
Details
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- CRID
- 1390282680490149888
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- NII Article ID
- 130004676261
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- COI
- 1:CAS:528:DC%2BC3cXisFKitrk%3D
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- ISSN
- 21881650
- 13823469
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- Text Lang
- en
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- Data Source
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- JaLC
- Crossref
- CiNii Articles
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- Abstract License Flag
- Disallowed