Simultaneous Measurement of Refractive Index and Thickness of Transparent Plates by Low Coherence Interferometry

DOI PDF Web Site Web Site BIBCODE 被引用文献2件 参考文献11件
  • OHMI Masato
    School and Allied Health Sciences, Faculty of Medicine, Osaka University, 1–7, Yamadaoka, Suita, Osaka 565 Japan
  • SHIRAISHI Takehisa
    Course of Electronic Engineering, Graduate School of Engineering, Osaka University, 2–1, Yamadaoka, Suita, Osaka, 565 Japan
  • TAJIRI Hideyuki
    Course of Electronic Engineering, Graduate School of Engineering, Osaka University, 2–1, Yamadaoka, Suita, Osaka, 565 Japan
  • HARUNA Masamitsu
    School and Allied Health Sciences, Faculty of Medicine, Osaka University, 1–7, Yamadaoka, Suita, Osaka 565 Japan Course of Electronic Engineering, Graduate School of Engineering, Osaka University, 2–1, Yamadaoka, Suita, Osaka, 565 Japan

書誌事項

公開日
1997
DOI
  • 10.1007/s10043-997-0507-1
公開者
公益社団法人 応用物理学会分科会 日本光学会

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説明

We demonstrate a novel low coherence Michelson interferometer which can provide simultaneous measurement of the refractive index and thickness of transparent plates used as a measured object. Unlike the existing low coherence interferometers reported so far, either an object or a focusing lens aligned on the signal arm is scanned repeatedly by a precise translation stage in synchronization with movement of a reflection mirror on the reference arm. The so-called object or lens scanning method gives us two measured quantities a movement distance of the stage between two light focusing states on the front and rear planes of an object and the corresponding optical path difference. These two measured quantities, result in desirable values of the index and thickness of the object with a short calculation. The measurement accuracy of .1% is expected for a thickness of more than 1 mm. In the experiment using the object scanning method, the accuracy of 0.3% or less was successfully attained for nearly 1-mm thick plates of fused quartz, sapphire, LiTaO3 and slide glass.

収録刊行物

  • Optical Review

    Optical Review 4 (4), 507-515, 1997

    公益社団法人 応用物理学会分科会 日本光学会

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