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Effect of Specimen Size on Viscoelastic Properties of Micro-thick SU-8 Polymer
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- Takio Kenichi
- University of Hyogo
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- Namazu Takahiro
- University of Hyogo
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- Inoue Syozo
- University of Hyogo
Bibliographic Information
- Other Title
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- 厚膜フォトレジストSU-8の粘弾性特性評価とサイズ効果に関する研究
Description
This paper describes the effects of specimen size and temperature on viscoelastic properties of microscale SU–8 polymers at intermediate temperatures.Young′s modulus of SU–8 is 3.5GPa at R.T., which decreases with temperature elevations regardless of specimen size.Fracture strain has both size and temperature dependencies.The master curves of relaxation modulus for micro/milliscale SU–8 have been constructed for the first time, which has size dependencies.
Journal
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- Proceedings of JSPE Semestrial Meeting
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Proceedings of JSPE Semestrial Meeting 2005A (0), 1037-1038, 2005
The Japan Society for Precision Engineering
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Details 詳細情報について
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- CRID
- 1390282680625751168
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- NII Article ID
- 130004656667
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- Data Source
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- JaLC
- CiNii Articles
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- Abstract License Flag
- Disallowed