Effect of Specimen Size on Viscoelastic Properties of Micro-thick SU-8 Polymer

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  • 厚膜フォトレジストSU-8の粘弾性特性評価とサイズ効果に関する研究

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This paper describes the effects of specimen size and temperature on viscoelastic properties of microscale SU–8 polymers at intermediate temperatures.Young′s modulus of SU–8 is 3.5GPa at R.T., which decreases with temperature elevations regardless of specimen size.Fracture strain has both size and temperature dependencies.The master curves of relaxation modulus for micro/milliscale SU–8 have been constructed for the first time, which has size dependencies.

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