Analysis of error propagation in profile measurement by using stitching method

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  • ステッチング法を用いた形状測定における誤差伝播

Abstract

Stitching method is a technique which enables longer measuring range of profile from several measured profiles partly overlapping measurement range. Here, accuracy of the profile obtained by stitching method is analyzed and estimated considering that error in each measurement is propagated to the error of entire profile.

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