Three Dimensional Displacement Measurement using Ring–Slit Ray (5th report)

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Other Title
  • リング状スリット光を用いた三次元変位測定(第5報)
  • 小型·一体化装置の開発

Description

For 3D positioning of a complex 3D mechanism flexibly, it is needs to measure 3D displacement of an end–effecter of the mechanism in the high precision by non–contact method. It was common to put the plural sensor or scale together and to measure the 3D displacement of the mechanism. However, it is difficult to calibrate positions and sensitivities of the plural sensor or scale. Therefore, the novel three dimensional displacement measuring method is proposed using the optics that focus is collected in the center of the spherical target which has been used for the radius measurement of the ball. Instead of high sensitivity on measuring in the XY direction, new ideas are necessary for the measurement in the Z direction in this optics. Therefore, a ring beam is used instead of the simple ray for Z direction measurement. The theoretical examination and simulation of the three dimensional displacement measurement using the ring beam were done and that validity is confirmed by the series of the experiments. And the non–linearity was improved by the ellipse approximation of the ring image. In this report, we developed the compact equipment for 3D displacement measurement and the influence of the temperature change was investigated.

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