Development of laser interferometer with picometer resolution using tunable laser

DOI

Bibliographic Information

Other Title
  • 周波数可変レーザを用いたピコメートル干渉測長法の開発
  • 4-st report: Extension of measurement range
  • 第４報：広範囲変位計測への展開と制御の最適化

Description

We have developed a displacement measurement method with picometer resolution using a phase modulation homodyne interferometer (PMHI) and a tunable laser diode (TLD). In the 3-th report, we showed a direct measurement method of a free spectral range (FSR). However, a steady-state deviation remained in the servo control. In this report, we show an optimization of the servo control for reducing the steady-state deviation.

Journal

Keywords

Details 詳細情報について

  • CRID
    1390282680628215168
  • NII Article ID
    130005028058
  • DOI
    10.11522/pscjspe.2007a.0.689.0
  • Data Source
    • JaLC
    • CiNii Articles
  • Abstract License Flag
    Disallowed

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