Development of a micro-angle sensor

DOI

Bibliographic Information

Other Title
  • マイクロ角度センサに関する研究

Abstract

This paper presents a micro-angle sensor for measurement surface profiles and error motions. The sensor is based on the principle of laser autocollimation. To reduce the sensor size without reducing the angle resolution, the relationship between the spot size on the focal plane of the objective lens and the output of the photodetector with separate elements is analyzed with wave optics. A micro-angle sensor is then designed based on the analysis result. Experiments have been carried out.

Journal

Keywords

Details 詳細情報について

  • CRID
    1390282680628257024
  • NII Article ID
    130004657771
  • DOI
    10.11522/pscjspe.2005s.0.643.0
  • Data Source
    • JaLC
    • CiNii Articles
  • Abstract License Flag
    Disallowed

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