Effects of ultrasonic vibration on micro drilling with micro PCD drill
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- Ohnishi Osamu
- Kyushu University
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- Onikura Hiromichi
- Kyushu University
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- Torigoe Ryoma
- Kyushu University
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- Mizue Hiroshi
- Oita Industrial Research Institute
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- Kido Yukihito
- The Oita Prefectural Organization for Industry Creation
Bibliographic Information
- Other Title
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- PCDドリルを用いたマイクロ穴加工における超音波振動の効果
Abstract
This paper deals with the fabrication of micro PCD drills with a nominal diameter of 300 μm and their application. The fabricated drills were used in the drilling into quartz glass. In the drilling test, characteristics of the drilling and effects of ultrasonic vibration were investigated.
Journal
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- Proceedings of JSPE Semestrial Meeting
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Proceedings of JSPE Semestrial Meeting 2009S (0), 995-996, 2009
The Japan Society for Precision Engineering
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Keywords
Details 詳細情報について
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- CRID
- 1390282680628978688
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- NII Article ID
- 130005029977
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- Data Source
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- JaLC
- CiNii Articles
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- Abstract License Flag
- Disallowed