Development of a 3-axis angle sensor

DOI

Bibliographic Information

Other Title
  • 3軸角度センサに関する研究
  • 測定原理の提案と検証実験

Abstract

A new type of 3-axis angle sensor based on the laser autocollimation for angle detection is proposed. As in the case of 2-axis angle sensor, the sensor consists of a laser diode as the light source, and a quadrant photo diode (QPD) as the position-sensing device. Differing from a conventional 2-axis autocollimator, the sensor uses a 1-axis rectangle grating for target. The sensor size can be reduced while maintaining the sensor sensitivity, because sensitivity of θx (rolling) is determined by the target grating pitch and θy (pitching), θz (Yawing) are determined by wavelength of the laser source, but not influenced by the focal length of the objective lens. Experimental results are also presented.

Journal

Keywords

Details 詳細情報について

  • CRID
    1390282680629617920
  • NII Article ID
    130004658002
  • DOI
    10.11522/pscjspe.2006a.0.163.0
  • Data Source
    • JaLC
    • CiNii Articles
  • Abstract License Flag
    Disallowed

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