Study on Effect of Dressing Method on Pad Surface Characteristics in Polishing Technique

DOI

Bibliographic Information

Other Title
  • ポリシングにおけるドレス条件がパッド表面性状に及ぼす影響に関する研究
  • Application of Evaluation Parameters to Commercially Available Apparatus
  • 評価パラメータの実機装置への適用

Abstract

In this study, we aim to present parameters that can be used to evaluate pad surface conditions. Therefore, we discuss based on distribution analysis method of surface roughness profiles and contact image method using image rotation prism. Our previously report showed the results obtained by laboratory apparatus as fundamental experiment. This paper shows the results of application characteristics of presented evaluation parameters to commercially available apparatus. As the results, (1) the deviation value based on the roughness profiles, and (2-1) the contact ratio, (2-2) number of contact points and (2-3) spatial FFT results of a contact image were found to be effective for evaluating pad surface conditions.

Journal

Keywords

Details 詳細情報について

Report a problem

Back to top