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Piezoelectric-Actuated MEMS Micromirror Characteristics Dependence on Temperature Around Resonant Frequency
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- Morita Nobutomo
- Graduate School of Kyushu University
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- Takeshita Toshihiro
- Kyushu University
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- Kobayashi Takeshi
- National Institute of Advanced Industrial Science and Technology
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- Maeda Ryutaro
- National Institute of Advanced Industrial Science and Technology
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- Itou Toshihiro
- National Institute of Advanced Industrial Science and Technology
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- Sawada Renshi
- Kyushu University
Bibliographic Information
- Other Title
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- 圧電駆動式MEMSマイクロミラーの共振周波数付近における温度特性
Description
MEMS(Microelectromechanical Systems)マイクロミラーは小型プロジェクタ、内視鏡、超小型顕微鏡などの光学スキャニングデバイスへの応用が期待されるが、MEMSは温度の影響を大きく受ける。本論文では圧電駆動式MEMSマイクロミラーの共振周波数付近の温度特性について述べる。
Journal
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- Proceedings of JSPE Semestrial Meeting
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Proceedings of JSPE Semestrial Meeting 2011S (0), 789-790, 2011
The Japan Society for Precision Engineering
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Keywords
Details 詳細情報について
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- CRID
- 1390282680630914944
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- NII Article ID
- 130005030858
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- Data Source
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- JaLC
- CiNii Articles
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- Abstract License Flag
- Disallowed